Analysis the Performance of Controllers for He-Ne Laser Stabilization by Combination of Frequency Locking and Power Balanced Methods for Nano-Metrology Applications

In this paper, analysis the performance of PI, PI-like fuzzy, and parallel fuzzy P+ fuzzy I controllers for He-Ne lasers frequency stabilization by combination of frequency locking and power balanced methods is presented. He-Ne lasers can be attributed to an unstable system due to the influence of environmental factors on its' frequency. Therefore, the stabilization of He-Ne laser is so important in sensitive applications such as laser interferometers and nanometrology systems. The simulation results of controllers by powerful software MATLAB/SIMULINK-GUI show that parallel fuzzy P+ fuzzy I controller has better stabilization performance and integrated absolute error (IAE) than others. Also, frequency fluctuations of He-Ne laser is about ۲×۱۰-۱۱ by parallel fuzzy P+ fuzzy I controller.

کلیدواژه ها:

Cavity Length ، Controller ، He-Ne Lasers ، Nanometrology ، Thermal Instability ، واژگان کلیدی: کاواک لیزر ، کنترل­کننده ، لیزر هلیوم – نئون ، نانومترولوژی ، ناپایداری حرارتی