A Dynamic Model for Efficient Simulation of MEMS-Based CMOS Resonator

Polycrystalline silicon micromechanical resonators have remarkable characteristics, which make them suitable for use in oscillator and filtering purposes. This article discusses the dynamic analysis of a MEMS resonator made with post-CMOS technology. In this research, we propose developing an active model of the system under examination using the vector bond graph approach to predict the device's performance and functionality. The simulation study and the experimental results found in the literature show a strong agreement. The suggested technique enables the flexibility of modeling systems at an advanced level by combining results from specific simulation procedures to create a thorough model for devices. The recommended approach validates its features before manufacturing, reducing the need for multiple prototypes and hastening the time-to-market.

کلیدواژه ها:

dynamic ، MEMS ، biosensor ، resonant ، modeling