Effects of Substrate Angle on Deposited CNTs Film Thickness Uniformity

Quality of carbon nanotube (CNT) as micro electromechanical systems (MEMS) components can influenceon MEMS performance. Film uniformity of CNTs is acharacteristic that can affect on electrical and opticalproperties of produced CNTs. In this research, xyleneused as main carbon source for depositing CNTs onsubstrate surface via chemical vapor deposition (CVD)process. Therefore effects of substrate angle withhorizontal axis along the CVD reactor on CNTsdeposited thin film is numerically investigated anddiscussed in details. Results show increasing of substrateangle leads to improvement of CNTs film thicknessuniformity and also it can enhance the total production ofproduced CNTs.

کلیدواژه ها:

Chemical vapor deposition ، Carbonnanotube ، Film thickness uniformity ، Substrate angle