Investigating the amount of displacement on a cantilever beam in micrometer dimensions under applied forces

MEMS is the integration of mechanical elements, actuators, sensors, and electronics on a common silicon substrate through the utilization of micro-fabrication technology. Microcantilevers(Micromechanical beams) are miniature diving boards anchored at one end (Fixed End) and the other can move(free End). Microcantilever is the simplest mechanical structure fabricated rectangular bar-shaped structure, longer as compared to width, and has a thickness much smaller than its length or width. They are typically made of silicon, silicon nitride, or polymer materials. In this work, six cantilever beams with different dimensions have been simulated and their deviation under ۱ micronewton force has been investigated. Investigations showed that the cantilever beam with dimensions of ۴۵۰μ×۸۰μ×۱μ has the highest deviation under applied forces. Also, the amount of displacement of this MEMS-Based cantilever Beam made up of poly-silicon can be seen under the applied Electric potential. There is positive feedback between the electrostatic forces and the deformation of the cantilever beam. The forces bend the beam and thereby reduce the gap to the grounded substrate. The tip deflection is a function of applied voltage. Actually, the electric potential and electric field generate these displacements. The Finite element method is used for the simulation of MEMS cantilever structure by using Comsol Multiphysics software.

کلیدواژه ها:

MicroCantilever Beam ، Electric potential ، Displacement ، Force