Optimizing Microfluidics Hot Embossing: Fabrication Techniques, Mold Materials, and Parameter Influences

Microfluidics hot embossing is a pivotal technique in microfabrication, facilitating the production of miniature features at micrometer or nanometer scales for various applications. This process involves replicating precise microstructures on a substrate using heat and pressure, often requiring durable molds capable of withstanding temperature variations and substantial forces. The article delves into the fabrication process, discussing the critical stages of hot embossing and highlighting the importance of molds. Silicon and PMMA were explored as mold materials, with lithography and laser methods utilized for pattern imaging. The experiments revealed challenges in silicon mold durability, necessitating adjustments in layering sequences and the incorporation of hot plates for enhanced pattern transfer. A Taguchi experimental design was employed to assess the effects of various parameters on the hot embossing process of polycarbonate sheets, with a focus on temperature, pressure, and time. Results indicated that pressure significantly influenced channel width, with time and temperature also playing roles in pattern quality. The research presented contributes valuable insights into optimizing microfluidics hot embossing, offering improvements in mold materials, fabrication methods, and a comprehensive understanding of key parameters influencing the process.

کلیدواژه ها:

hot embossing ، PDMS mold ، microfluidics