Department of Mechanical Engineering, Islamic Azad University, Roudehen Branch Tehran, Iran

Plasma-assisted chemical vapor deposition method was used to construct a diamond-like carbon coating on aluminum substrate ۶۰۶۱-T۶. Sedimentation was carried out using CH۴ as a process gas at different temperatures of ۲۵۰-۳۰۰ Celsius with constant flow rate and power. Raman spectroscopy was used to describe these samples. Raman analysis of DLC coatings at different temperatures has been done in detail for two different wavelengths of stimulation of ۵۱۴ and ۷۸۵ nm and the results are shown in this paper. Peak changes were observed in both D and G peaks of Raman spectrum with increasing sediment temperature, indicating the formation of compressive strain in DLC coatings at high temperatures. Scattering is observed at both D and G peaks for different wavelengths of excitation, indicating that the DC coating is hydrogenated. It seems that the degree of hydrogenation of DLC coating decreases due to sediment temperature. The study of nano-indentation with increasing sediment temperature shows a marginal increase in hardness.

کلیدواژه ها:

DLC ، PACVD ، Aluminum ، Raman ، nano