The Influence of Heat Treatment on the Structural and Morphological Properties of ITO Thin Films

Indium tin oxide (ITO) thin films with composition of 10 wt% SnO2 and 90 wt% In2O3, and impurities balanced on glass substrates at room temperature were prepared by electron beam evaporation method and then was heated in air atmosphere at temperature 200 oC for 1 h. The influence of heat treatment on the structural and morphological properties of the films was studied. The film structure and surface morphologies were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). XRD patterns showed that heat treatment caused the crystallinity of thin films. Also, the structural studies by XRD reveal that the films exhibit preferential orientation along (2 2 2) plane. AFM results reveal that the heat treatment leads to an increase of surface roughness. This behavior is due to the aggregation of the native grains into the larger clusters upon heating. This different cluster size influences the surface morphology of the films

کلیدواژه ها:

ITO ، Thin film ، Heat treatment