Quasi-Static Response of an Electrically Actuated Fractional Model of Viscoelastic Microbeam

The MEMS structures usually are made from silicon, consideration of the viscoelastic effect in microbeams duo to the phenomena of silicon creep is necessary. Quasi-static response of an electrically actuated viscoelastic microbeam is presented in this paper. For this purpose, a nonlinear finite element formulation of viscoelastic beams using fractional derivative constitutive equations has been developed. The four-parameter fractional derivative model has been used to describe the constitutive equation. The electric force acting on the microbeam is defined. A method for solving the nonlinear algebraic equation is described. The deflected configuration for a microbeam with different purely DC voltage is presented. According to authors knowledge, it is the first time that fractional viscoelastic model is used to find the quasi-static response of a viscoelastic microbeams

کلیدواژه ها:

Viscoelastic ، Fractional derivatives ، Microbeams ، Finite element