BENDING EFFECTS ON THE TORSIONAL CHARACTERISTICS OF MICRO/NANO MIRRORS UNDER THE COMBINED EFFECT OF CAPILLARY FORCE AND CASIMIR FORCE

سال انتشار: 1391
نوع سند: مقاله کنفرانسی
زبان: انگلیسی
مشاهده: 1,903

فایل این مقاله در 6 صفحه با فرمت PDF قابل دریافت می باشد

استخراج به نرم افزارهای پژوهشی:

لینک ثابت به این مقاله:

شناسه ملی سند علمی:

ISME20_108

تاریخ نمایه سازی: 18 تیر 1391

چکیده مقاله:

The current paper models the coupling effect between torsion and bending in micro/nano mirrors under the combined effect of Casimir force and capillary force. First, the energy method, the principal of minimum total potential energy is utilized for finding the equations governing the deflection and rotation of micro/nano mirror. Then the implicit function theorem is utilized for finding the equations governing the pull-in state of the nano/micro mirror. The related results show that neglecting bending effect can lead to considerable overestimation in predicting the pull-in limits of the nano/micromirror under combined Casimir and capillary forces. It is observed that Casimir force reduces the pull-in angle and pull-in deflection of the supporting torsion beams of the mirror. The static behavior of the mirror under capillary and Casimir loading is also studied and the results reveal that the static behavior of the nano/micromirror under capillary and Casimir forces highly depends on the bending of the torsion beams. The results of this paper can be used for a safe and stable design and fabrication of mirrors using the wet etching process, where the gap between themirror and the underneath substrate is sufficiently small and as a results both capillary and Casimir forces have significant role in the stability of the system.

نویسندگان

Ali Darvishian

School of Mechanical Engineering, Sharif University of Technology

Hamid Moeenfard

School of Mechanical Engineering, Sharif University of Technology

Hassan Zohoor

School of Mechanical Engineering, Sharif University of Technology

Mohammad Taghi Ahmadian

School of Mechanical Engineering, Sharif University of Technology

مراجع و منابع این مقاله:

لیست زیر مراجع و منابع استفاده شده در این مقاله را نمایش می دهد. این مراجع به صورت کاملا ماشینی و بر اساس هوش مصنوعی استخراج شده اند و لذا ممکن است دارای اشکالاتی باشند که به مرور زمان دقت استخراج این محتوا افزایش می یابد. مراجعی که مقالات مربوط به آنها در سیویلیکا نمایه شده و پیدا شده اند، به خود مقاله لینک شده اند :
  • M.I Younis, 2004, "Modeling and Simulation of Mi croel e ...
  • N. Maluf, K. Williams, 1999, _ Introduction to Systems Engineering, ...
  • novel A:ه [3] P.C.P Chao, C.W. Chiu, C.Y. Tsai, 2006, ...
  • H. Toshiyoshi, H. Fujita, 1996, :Electrostatic micro torsion mirros for ...
  • L.J.Hornbeck, 1991 "Spatial light modulator and method", US Patent 5, ...
  • D.L. Dickensheets, and G.S. Kino, 1998, :Silicon- optical ...
  • microscope:, Journal of M i cr _ e ctromechanicl Systems, ...
  • Capillary Forces-Part 2: Experiments", Journal of Mi croel e ctromechanicl ...
  • L. Zitzler, S. Herminghaus, F. Mugele, 2002, "Capillary forces in ...
  • Xide Li, Yun Peng, 2006; "Ilnvestigation _ capillary adhesion between ...
  • J. Jang, G.C. Schatz, M.A Ratner, 2004, :Capillary force in ...
  • J.M. Huang, A.Q. Liu, Z.L. Deng, Q.X. Zhang, J. Ahn, ...
  • H. Liu, S. Gao, S. Niu, L. Jin, 2010, "Analysis ...
  • S.S. Rao, 2007, :Vibration of Continuous Systems", John Wiley & ...
  • O. B ochobz a-Degani _ _ Nemirovsky, 2002, "Modeling the ...
  • J.E. Ford, V.A. Aksyuk, D.J. Bishop, J.A. Walker, 1999, :Wavelenghth ...
  • G. Xie, J. Ding, S. Liu, W. Xued, J. Luob, ...
  • A. Gusso, G.J. Delben, 2007, :Influence of the Casimir force ...
  • W.H. Lin, Y.P. Zhao, 2005, :Casimir effect on the pull-in ...
  • A. Ramezani, A. Alasty, J. Akbari, 2007, :Pull-in parameters of ...
  • A. Ramezani, A. Alasty, J. Akbari, 2008, "Analytical investigation and ...
  • M. Mojahedi, H. Moeenfard, M. T. Ahmadian, 2009, _ new ...
  • J.G. Guo, Y.P. Zhao, 2004, :Influence of van der Waals ...
  • M IC ROE _ C TROMEC HANICAL VOL. 13, NO. ...
  • Z. Wei, and Y.P. Zhao, 2007, :Growth of liquid bridge ...
  • P. J. van Zwol, G. Palasantzas, J. Th. M. De ...
  • C. H. Mastrangelo, C. H. Hsu, 1993, :Mechanical Stability and ...
  • C. H. Mastrangelo, C. H. Hsu, 1993, :Mechanical Stability and ...
  • نمایش کامل مراجع