Sol-gel spin coating derived ZnO thin film to sense the acetic acid vapor

ZnO thin film of ۸۰ nm thickness was deposited by the sol-gel spin coating method on SiO۲/Si substrate and subsequently post-annealed at ۵۰۰°C with a flow of oxygen for ۶۰ min. Crystallographic structure of the sample was characterized by X-ray diffraction (XRD) method while a field emission scanning electron microscope (FESEM) was used to investigate the surface physical morphology and chemical composition. The sensitivity of the sample was tested to acetic acid vapor with different concentrations (۲۰ ppm, ۴۰ ppm, and ۸۰ ppm) in the temperature range of ۲۰۰-۴۰۰ °C. The results showed that the ZnO thin film can be introduced as an acetic acid vapor sensor with a good reliability and detection limit of ۲۰ ppm at the operating temperature of ۳۲۰°C.

کلیدواژه ها:

Acetic acid ، Sensitivity ، Sol-gel ، Thin film ، ZnO