Design and simulation of pH sensor based on Ion-sensitive field effect transistor and Improve of sensor performance with using of microfluidic technology

Due to the increasing need for small chips, the use of new technologies in the manufacture of transistors as a major component of the chip seems necessary. In this paper, is simulated a pH sensor based on ion-sensitive field-effect transistor (ISFET) for biological sensing and Improved biosensor performance using microfluidic technology. ISFET sensors are mostly used in the field of biosensors. Also in this paper, is improved ISFET sensor performance with the simulation of the microfluidic channel, is improved the sensor performance. With electrodes placing in the wall of the microchannel and with voltage applying to the electrodes and creating an electroosmotic flow inside the microchannel, is created a state of turbulence in the microchannel which this acting of cause the transmit of Intended analytes to the sensor surface. Also, with the simulation of ISFET sensor in comsol software, is investigated the output diagrams in different modes.

کلیدواژه ها:

ISFET ، MOSFET ، pH sensor ، Microfluidic ، Electrokinetics ، Electroosmotic ، Oxide Layer