Liquid Flow Meter based on a Thermal Anemometer Microsensor

An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.

کلیدواژه ها:

Thermal flow sensor ، Heat mass transfer ، Liquid flow meter ، MEMS