Effect of Catalyst on Grows of Diomond-like Carbon by HFCVD

Diom ond-like carbon (DLC) is a metastable form of amorphous carbon containing a significant fraction of sp۳ bonds.It can have a high mechanical hardness, chemical inertness, optical transparency, and it is a wide band gap semiconductor [۱].In this work DLC s were grown on silicon substrate that coated with Ni and Au nanocatalyst by hot filament chemical vapo r deposition (HFCVD) technique. A combination of CH۴/H۲ renders the growt h of carbon nanostructu res. Catalytic layers and DLCs were characterized by SEM and Raman spectroscop y.Raman spectroscopy is an eff ective technique for the characterization of DLC structure [۲], all carbo n materials s uch as DLC coatings indicate features in Raman spectra, named as D and G peaks. In amorphous carbons, the intensity ratio ID/IG is related to the size of the sp۲ phase organized in rings [۳].In this study,the above ratio fo r the two samples with various catalysts were compared.

کلیدواژه ها:

diamond like carbon ، DLC ، HFCVD ، RAMAN SEPECTROSCOPY