Effect of su bstrate te mperature on Ag/C :H films prepared by PECVD devices

Silver is an efficacious and useful antibacterial agent. It is reported to kill o ver ۶۵۰ bac terial strains . Silver nanoparticles could be p otentially a pplied as bacterial re sistant layer s for biomedical application .This paper investigate characterization of Ag/C:H films prepared by Plasma-enhanced chemical va por depositi on (PECVD ) method. P lasma poly mer coatings with embed ded Ag nanoparticles w ere deposit ed in low pressure DC plasma using an asymme trical setup with an Ag electrode. The combin ation of plasma polym erization us ing Ag/CH۴ gas mixture and co-sputtering fro m an Ag target enables the incorporation of A g nanoparticles in a plasma polymer matrix. The influence o f the substrate temperature on properties of A g/C:H films has been in vestigated. In ۱۹۸۸ Bied erman alrea dy reviewed different p lasma deposition techniques of metal/polymer composite films. Kay and Perrin et al. used a RF dischar ge for the d eposition o f gold nan oparticles of different size in a fluorocarbo n matrix .H anna Boldyryeva use DC planar ma gnetron deposition for the composite Ag/C:H films. [۱-۴]

کلیدواژه ها:

Ag ، PECVD ، Plasma ، Sput tering ، Poly merization