Investigation of Mode shapes on a cantilever beam in dimensions of micrometer

MEMS is a manufacturing technology that creates tiny integrated devices and combines mechanical and electrical components in size from a few micrometers to millimeters.Microbiosensor or nano biosensor devices based on related MEMS technologies provide devices that could easily be integrated into portable ‘‘ lab-on chip’’ platforms.A cantilever Beam in dimensions of a micrometer is the simplest mechanical structure fabricated rectangular, longer as compared to width, and has a thickness much smaller than its length or width., which is fixed firmly at one end and free at the other end. Finite Element Method(FEM) is used for the simulation of MEMS cantilever structure by using Comsol Multiphysics software.

کلیدواژه ها:

Mems ، BioSensor ، Cantilever beam ، Mode shapes