Maryam Norouznejad Jelodar
Bahram Azizollah Ganji

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output. First the structures of two capacitive pressure sensors with clamped square flat diaphragms, with different thicknesses are investigated and their sensitivity and non-linearity are compared together. Finally for increasing the sensitivity and linearity, a new capacitive pressure sensor with a stepped diaphragm is introduced. A numerical solution for determination of the accurate sensitivity of the sensor is presented. The results show that the sensitivity of the sensor is increased from ۰.۰۶۳ fF/KPa with flat diaphragm to ۰.۱۰۷ fF/KPa with stepped diaphragm and also the non-linearity is decreased from ۲.۳۷% to ۱.۸۵۷%. In this design, the sensor sensitivity and output linearity are increased simultaneously.

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