S Najafi - Mechanical Engineering Department, Urmia University, Urmia, Iran
S Dowlati - Electrical Engineering Department, Urmia University, Urmia, Iran
G Rezazadeh - Mechanical Engineering Department, Urmia University, Urmia, Iran
S Azizi - Mechanical Engineering Department, Urmia University, Urmia, Iran

Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement equations. Eventually, considering the micro-plate of various materials, the effects of geometrical parameters including the length and width of micro-plate and also ambient temperature on the thermo-elastic damping quality factor have been investigated

In-plane Vibration,Thermo-elastic Damping,Quality Factor,Rectangular Micro-plate,