A mixed lithography method for Patterning sub-micron interdigitated electrodes

In this work we offered a method to design electrochemical biosensors by shrinking down the size of interdigitated electrodes and in the meantime saving or increasing the number of electrodes. Using this method we can design a lab on a chip device which can sense multiple analytes simultaneously in the same sensor sizes as traditional sensors. These nano interdigitated electrodes can also be used in contacting nanoribbons of graphene for Tera hertz and optical applications[5].A two level lithography which contains both photolilthography and electron beam lithography (EBL) seems to be a wise choice because EBL is a slow and limited method for patterning large areas and photolithography is suitable for large scales but limited in sub-micron features.

کلیدواژه ها:

glucose ، biosensors ، CNT ، graphene ، interdigitated electrodes