Maryam Lashani - Department of Physics, Marvdasht Branch Islamic Azad University, Marvdasht, Iran
Ghahraman Solookinejad - Department of Physics, Marvdasht Branch Islamic Azad University, Marvdasht, Iran

In this article, the sol-gel method is used to generate an Zinc Oxide (ZnO) thin film on a glass substrate at different annealing temperature. Using fractal analysis, the increase of annealing temperature on the characteristics of the surface morphology of ZnO thin films were calculated at different temperatures and the effect on the sensor morphology of ZnO thin films was studied. It was observed that with increasing annealing temperature, interface width and lateral correlation length decreases from 350˚C to 450˚C and increas from 450˚C to 550˚C, also roughness exponent is decreased. Finally the best temperature for sensors was 450˚C.

Zinc Oxide (ZnO), thin film, sol-gel, morphology, sensor