Nowadays, micro motors have widespread applications in the industry. However, not many references exist about these motors. To remove this problem, a comprehensive review on micro motors is presented in this paper. For this purpose, different type of micro motors discussed and their potential and challenges are addressed. Besides, a comparison between electrostatic and electromagnetic micro motors is performed. Regarding their efficiency, power density, force to dimensions dependency and their advantages and drawbacks are investigated. Finally, the methods of fabrication of some of their applications are expressed.

Micro Motors, en, structures, comparison, performance, application, Fabrication