Nano-roughness Measurement of Semiconductor Substrates by Using Light Scattering Properties
- سال انتشار: 1387
- محل انتشار: دومین کنگره بین المللی علوم و فناوری نانو
- کد COI اختصاصی: ICNN02_391
- زبان مقاله: انگلیسی
- تعداد مشاهده: 768
نویسندگان
Faculty of Electrical and Computer Engineering, Noshirvani University of Technology
Department of Electrical and Computer Engineering, Tarbiat Modares University,
چکیده
The roughness of semiconductor substrate is an important issue in growing the isotropic layers by liquid phase epitaxial (LPE) procedure. After the preparation process (grinding and polishing), the roughness of substrate is measured by equipments like stylus profilemeters or scanning probe microscope (SPM). These equipments are costly and their tip may even cause mechanical damage on surface. In this paper, we propose an effective, non-destructive, non-contact and easy optical method to measure root mean square (RMS) roughness (Rq) in nanometer scale.Total integrated scattering (TIS) and angle-resolved scattering (ARS) are methods that are most often used for measuring the surface roughness by light scattering [1]. In both of the two methods, a coherent laser beam with wavelength λ, is incident on a rough surface at angle θ , which is scattered in hemisphere. In TIS, for a surface with Gaussian distributed height, the ratio of the specular reflectance (Is) to the total scattering (Io) (including Is), is related to RMS roughness (Rq) as [1]: 22)/4exp()/cos4exp(λπλθπqqosRRIITIS≅== (1)On the other hand, ARS deals with angular distribution of laser light around the specular scattering direction. ARS have a direct relation with power spectral density (PSD) of surface height [1, 2]. However, the relation is more complicated and the experimental data are often used to obtain a mathematical formulaکلیدواژه ها
مقالات مرتبط جدید
اطلاعات بیشتر در مورد COI
COI مخفف عبارت CIVILICA Object Identifier به معنی شناسه سیویلیکا برای اسناد است. COI کدی است که مطابق محل انتشار، به مقالات کنفرانسها و ژورنالهای داخل کشور به هنگام نمایه سازی بر روی پایگاه استنادی سیویلیکا اختصاص می یابد.
کد COI به مفهوم کد ملی اسناد نمایه شده در سیویلیکا است و کدی یکتا و ثابت است و به همین دلیل همواره قابلیت استناد و پیگیری دارد.